Review of fringe-projection profilometry and phase measuring deflectometry

被引:0
作者
Liu D. [1 ]
Yan T. [1 ]
Wang D. [2 ]
Yang Y. [1 ]
Huang W. [3 ]
机构
[1] State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou
[2] College of Metrology and Measurement Engineering, China Jiliang University, Hangzhou
[3] State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun
来源
| 2017年 / Chinese Society of Astronautics卷 / 46期
关键词
Accuracy; Comparison; Fringe-projection profilometry; Phase measuring deflectometry; Speed;
D O I
10.3788/IRLA201746.0917001
中图分类号
学科分类号
摘要
Fringe-projection profilometry and phase measuring deflectometry can realize high accurate measurement of three-dimensional shape, which has good development prospect in the full field threedimensional profilometry. First, the measuring principles of fringe-projection profilometry and phase measuring deflectometry were introduced. Moreover, the technologies of phase extracting and camera calibration in fringe-projection profilometry and phase measuring deflectometry were also especially emphasized, which were key technologies. Then the similarities and differences of fringe-projection profilometry and phase measuring deflectometry were compared. What's more, the development direction and problems to be solved of enhancing the measurement accuracy and speed in fringe-projection profilometry and phase measuring deflectometry were introduced. In order to improve the measurement accuracy, main methods can be divided as follows: correcting the the Gamma effect of a digital projector and a digital camera, improving the phase extraction accuracy of the fringes, enhancing the camera calibration accuracy, phase-height/gradient calibration accuracy and other means. In order to improve the measurement speed, the phase extraction speed and the phase unwrapping speed were improved. © 2017, Editorial Board of Journal of Infrared and Laser Engineering. All right reserved.
引用
收藏
相关论文
共 37 条
[1]  
Su P., Oh C.J., Parks R.E., Et al., Swing arm optical CMM for aspherics, SPIE Optical Engineering + Applications, 7246, (2009)
[2]  
Liu B., Li B., Tian A., Compensation and identification of non-common path error in lateral shearing interferometry, Infrared and Laser Engineering, 44, 8, pp. 2406-2410, (2015)
[3]  
Wang X., Measurement of large off-axis convex asphere by systemic stitching testing method, Chinese Optics, 9, 1, pp. 130-136, (2016)
[4]  
Ma Z., Peng L., Wang G., High-precision CGH substrate figuring by ion beam, Chinese Optics, 9, 2, pp. 270-276, (2016)
[5]  
Platt B.C., Shack R., History and principles of Shack-Hartmann wavefront sensing, Journal of Refractive Surgery, 17, 5, pp. S573-S577, (2001)
[6]  
Su X.Y., Zhou W.S., Von Bally G., Et al., Automated phasemeasuring profilometry using defocused projection of a Ronchi grating, Optics Communications, 94, 6, pp. 561-573, (1992)
[7]  
Juptner W., Bothe T., Sub-nanometer resolution for the inspection of reflective surfaces using white light, SPIE Nano Science + Engineering, 7405, (2009)
[8]  
Faber C., Olesch E., Krobot R., Et al., Deflectometry challenges interferometry: the competition gets tougher, SPIE Optical Engineering+ Applications, 8493, (2012)
[9]  
Knauer M.C., Kaminski J., Hausler G., Phase measuring deflectometry: a new approach to measure specular free-form surfaces, Photonics Europe, pp. 366-376, (2004)
[10]  
Speck A., Zelzer B., Kannengiesser M., Et al., Inspection of freeform intraocular lens topography by phase measuring deflectometric methods, Applied Optics, 52, 18, pp. 4279-4286, (2013)