High position resolution MEMS Fabry-Perot tunable filter with dual electrodes electrostatic actuator

被引：0
作者：
机构：
[1] Seiko Epson Corporation, Suwa-gun, Nagano 399-0295, 1010, Fujimi, Fujimi-machi
[2] Interdisciplinary Graduate School of Science and Technology, Shinshu University, Nagano, Nagano 380-8553, 4-17-1, Wakasato
[3] Faculty of Engineering, Shinshu University, Nagano, Nagano 380-8553, 4-17-1, Wakasato
来源：
Hirokubo, N. | 1600年 / Institute of Electrical Engineers of Japan卷 / 133期
关键词：
Actuator; Fabry-Perot filter; MEMS; Resolution; Tunable;
D O I：
10.1541/ieejsmas.133.54
中图分类号：
学科分类号：
摘要：
In this paper, we report a MEMS Fabry-Perot tunable filter with Dual Electrodes Electrostatic Actuator (DEEA) which improves the resolution of the mirror gap positioning. This device improved positioning resolution by changing two actuators of the DEEA and achieved the higher resolution less than 0.1nm by using 12bit driver circuit. © 2013 The Institute of Electrical Engineers of Japan.
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页码：54 / 55
页数：1
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