Influence of oxygen flow on structure and optical properties of TiOx films

被引:0
|
作者
Zhou, Ji-Cheng [1 ]
Rong, Lin-Yan [1 ]
Zhao, Bao-Xing [1 ]
Li, Li [1 ]
机构
[1] School of Physics Science and Technology, Central South University, Changsha 410083, China
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:138 / 143
相关论文
共 50 条
  • [41] Influence of oxygen flow rate on structural, optical and electrical properties of copper oxide thin films prepared by reactive magnetron sputtering
    Gaewdang, Thitinai
    Wongcharoen, Ngamnit
    INTERNATIONAL CONFERENCE ON AEROSPACE, MECHANICAL AND MECHATRONIC ENGINEERING (CAMME 2017), 2017, 211
  • [42] Effects of argon oxygen flow rate on the microstructure and optical properties of ZAO thin films
    Zhu, H. (zwchua@163.com), 1808, Chinese Ceramic Society, Baiwanzhuang, Beijing, 100831, China (42):
  • [43] Ti and TiOx seeding influence on the orientation and ferroelectric properties of sputtered PZT thin films
    Millon, C
    Malhaire, C
    Barbier, D
    SENSORS AND ACTUATORS A-PHYSICAL, 2004, 113 (03) : 376 - 381
  • [44] Influence of Al-doping and Oxygen Partial Pressure on the Optical Properties of ZnO Films
    Ma, S. Y.
    Chen, H. X.
    Glass, J. T.
    Parker, C. B.
    Li, Y.
    NANOTECH CONFERENCE & EXPO 2009, VOL 1, TECHNICAL PROCEEDINGS: NANOTECHNOLOGY 2009: FABRICATION, PARTICLES, CHARACTERIZATION, MEMS, ELECTRONICS AND PHOTONICS, 2009, : 273 - +
  • [45] Influence of oxygen vacancies on optical properties of anatase TiO2 thin films
    Iijima, Koji
    Goto, Masako
    Enomoto, Shogo
    Kunugita, Hideyuki
    Ema, Kazuhiro
    Tsukamoto, Masanori
    Ichikawa, Noriya
    Sakama, Hiroshi
    JOURNAL OF LUMINESCENCE, 2008, 128 (5-6) : 911 - 913
  • [46] The influence of oxygen on the optical properties of RF-sputtered zinc oxide thin films
    Gioffre, M.
    Angeloni, M.
    Gagliardi, M.
    Iodice, M.
    Coppola, G.
    Aruta, C.
    Della Corte, F. G.
    SUPERLATTICES AND MICROSTRUCTURES, 2007, 42 (1-6) : 85 - 88
  • [47] Influence of oxygen concentration on optical properties of semi-insulating polycrystalline silicon films
    Kucirkova, A
    Navratil, K
    Pajasova, L
    Vorlicek, V
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1996, 63 (05): : 495 - 503
  • [48] Influence of O2/Ar flow ratio on the structure and optical properties of sputtered hafnium dioxide thin films
    Liu, Wenting
    Liu, Zhengtang
    Yan, Feng
    Tan, Tingting
    Tian, Hao
    SURFACE & COATINGS TECHNOLOGY, 2010, 205 (07): : 2120 - 2125
  • [49] Influence of Bath Parameters on the Structure and Optical Properties of CdSe Nanocrystalline Thin Films
    Agrawal, P.
    Sachdeva, M.
    Singh, Anupinder
    Suthar, B.
    Bhargava, A.
    PROCEEDING OF INTERNATIONAL CONFERENCE ON RECENT TRENDS IN APPLIED PHYSICS & MATERIAL SCIENCE (RAM 2013), 2013, 1536 : 169 - +
  • [50] Influence of buffer layer thickness on the structure and optical properties of ZnO thin films
    Hong, RJ
    Shao, JD
    He, HB
    Fan, ZX
    APPLIED SURFACE SCIENCE, 2006, 252 (08) : 2888 - 2893