Study on the preparation of amorphous silicon film and its crystallization property

被引：0

作者：

Luo, Shi-Yu ^{[1
,2
]}

Feng, Lei ^{[1
,2
]}

Wang, Hong ^{[2
]}

Lin, Hui ^{[1
]}

Teng, Hao ^{[1
]}

Huang, Tao-Hua ^{[1
]}

Zhou, Sheng-Ming ^{[1
]}

机构：

[1] Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

[2] Department of Physics and Material Science, Anhui University, Hefei 230039, China

来源：

Rengong Jingti Xuebao/Journal of Synthetic Crystals | 2008年 / 37卷 / 05期

关键词：

a-Si films - Amorphous silicon film - Annealing temperatures - Blue shift - Crystallization properties - K9 glass - Low temperatures - Scattering peak;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：1191 / 1194