Recent trends of plasma engineering -Infrared spectroscopy of plasma process and plasma processing in graphene research

被引：0
作者：
Shinohara, Masanori [1 ]
Kim, Jaeho [2 ]
机构：
[1] Nagasaki University, 1-14, Bunkyo, Nagasaki 852-8521, Japan
[2] National Institute of Advanced Science and Technology (AIST), 1-1-1, Umezono, Tsukuba 305-8568, Japan
来源：
IEEJ Transactions on Fundamentals and Materials | 2014年 / 134卷 / 01期
关键词：
Compendex;
D O I：
10.1541/ieejfms.134.41
中图分类号：
学科分类号：
摘要：
Graphene
引用
收藏
页码：41 / 46
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