Study of nanocrystalline diamond film deposited rapidly by 500 W excimer laser

被引：0
|
作者：
Peng, Hongyan [1 ]
Sheng, Jiajing [1 ]
Yang, Guilong [1 ]
机构：
[1] Heilongjiang Research Inst of, Optoelectric Technology, Mudanjiang, China
来源：
Chinese Journal of Lasers B (English Edition) | 2000年 / B9卷 / 03期
关键词：
Deposition - Diamond films - Excimer lasers - Nanostructured materials;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A high quality nanocrystalline diamond film deposited rapidly by an XeCl excimer laser operated at high laser power (500 W) and repetition rate (300-500 Hz) is presented. A high deposition rate, 250 nm/thousand pulses, was obtained. The effects of laser energy fluence and repetition rate on the deposition of diamond film were investigated.
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页码：201 / 205
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