Diffractive multi-beam ultra-fast laser micro-processing using a spatial light modulator

被引：2

作者：

Laser Group, Department of Engineering, University of Liverpool, Brownlow Street, Liverpool, L69 3GQ, United Kingdom ^{[1
]}

机构：

[1] Laser Group, Department of Engineering, University of Liverpool, Liverpool, L69 3GQ, Brownlow Street

来源：

Zhongguo Jiguang | 2009年 / 12卷 / 3093-3115期

关键词：

Computer generated holograms (CGH); Femto-second laser; Spatial light modulator (SLM);

D O I：

10.3788/CJL20093612.3093

中图分类号：

学科分类号：

摘要：

Multi-beam ultra-fast laser parallel microprocessing using spatial light modulation is demonstrated in this paper. Diffractive multi-beam patterns are generated with a spatial light modulator (SLM), which is driven by computer generated holograms (CGHs). The CGHs calculated by appropriate algorithms are displayed on the SLM to split an input laser beam to a number of beamlets and digitally manipulate their positions and intensity. The undesired damage by the energetic zero order beam can be avoided by either installing a 4f optical system to block the zero order at the Fourier plane or adding a Fresnel zone lens on the CGH to defocus the zero order at the processing plane. The surface ablation of materials using multi-beam patterns synchronised with a scanning galvanometer system shows flexible and high throughput parallel processing. By tightly focusing the diffractive beams with an objective into transparent materials, high speed dynamic femto-second laser two-dimensional (2D) and three-dimensional (3D) internal structuring is also presented. The results demonstrate the high precision micro-processing with higher efficiency, showing the potential for ultra-fast laser parallel processing in real industrial applications.

引用

页码：3093 / 3115

页数：22

共 80 条

[1]

Du D., Liu X., Korn G., Et al., Laser-induced breakdown by impact ionization in SiO<sub>2</sub> with pulse widths from 7 ns to 150 fs, Appl. Phys. Lett., 64, pp. 3071-3073, (1994)

[2]

Liu X., Du D., Mourou G., Laser ablation and micromachining with ultrashort laser pulses, IEEE J. Quantum Electron., 33, pp. 1706-1716, (1997)

[3]

Chichkov B.N., Momma C., Nolte S., Et al., Femto-second, picosecond and nanosecond laser ablation of solids, Appl. Phys. A, 63, pp. 109-115, (1996)

[4]

Dausinger F., Machining of metals with ultrashort laser pulses: From fundamental investigations to industrial applications, SPIE, 5777, (2005)

[5]

Baum A., Scully P.J., Perrie W., Et al., Pulse-duration dependency of femtosecond laser refractive index modification in poly(methyl methacrylate), Opt. Lett., 33, pp. 651-653, (2008)

[6]

Guo H., Jiang H., Fang Y., Et al., The pulse duration dependence of femtosecond laser induced refractive index modulation in fused silica, J. Opt. A: Pure Appl. Opt., 6, pp. 787-790, (2004)

[7]

Baum A., Scully P.J., Basanta M., Et al., Photochemistry of refractive index structures in poly(methyl methacrylate) by femtosecond laser irradiation, Opt. Lett., 32, pp. 190-192, (2007)

[8]

Harzic R.Le., Breitlung D., Weikert M., Et al., Pulse width and energy influence on laser micromachining of metals in a range of 100 fs to 5 ps, Appl. Surf. Sci., 249, pp. 322-331, (2005)

[9]

Perrie W., Gill M., Robinson G., Et al., Femtosecond laser microstructuring of aluminium under helium, Appl. Surf. Sci., 230, pp. 50-59, (2004)

[10]

Luft A., Franz U., Emsemann A., Et al., A study of thermal and mechanical effects on materials induced by pulsed laser drilling, Appl. Phys. A, 63, pp. 93-101, (1996)

← 1 2 3 4 5 6 7 8 →