Grating measuring instrument with high resolution developed by neural networks technique

被引：0

作者：

Zhu, Qing-Bao ^{[1
]}

机构：

[1] Dept. of Comp., Nanjing Normal Univ., Nanjing 210097, China

来源：

Jiliang Xuebao/Acta Metrologica Sinica | 2002年 / 23卷 / 04期

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学科分类号：

摘要：

A grating measuring instrument with high resolution developed with the neural networks technique is described. In the instrument, the BP Neural Network is used to subdivide the grating signal. Even if there are only seven training samples, the subdividing accuracy will be 0.18 micron. By means of this, the hardware design is not only simplified greatly, but also the resolution of the instrument and the reliability of system are remarkably improved.

引用

页码：266 / 270

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