Elimination of the nonlinearity of heterodyne displacement interferometers

被引：0

作者：

College of Optic and Electronic Engineering, University Shanghai for Science and Technology, Shanghai 200093, China ^{[1
]}

机构：

[1] College of Optic and Electronic Engineering, University Shanghai for Science and Technology

来源：

Hou, W. (houwenmei@vip.citiz.net) | 2012年 / Science Press卷 / 39期

关键词：

Heterodyne interferometer; Laser optics; Nonlinearity; Phase compensation; Polarizer;

D O I：

10.3788/CJL201239.0908006

中图分类号：

学科分类号：

摘要：

The heterodyne laser interferometer can achieve a sub-nanometer resolution on the basis of a stable subdivision of the light wavelength using phase measurement. However, due to inevitable imperfectness in optical system, a phase error occurs in the measurement signal and results in a nonlinear relation between the measured phase difference and the respective displacement. Based on the optical phase compensation theory, a significant approach is found to eliminate the nonlinearity of laser interferometer. This method can be used in most science researches and the industry precision nanometer measurement, and it is valid for nonlinearity errors whether it is a one-order or a two-order error.

引用

共 23 条

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