Evaluation of high temperature outgassing rates of stainless steel in method of switching between two pumping paths

被引：0

作者：

Guo D. ^{[1
,2
]}

Zhang J. ^{[1
]}

Meng J. ^{[1
]}

Yang X. ^{[1
]}

Luo C. ^{[1
]}

Yang W. ^{[1
]}

Zhao Y. ^{[1
]}

Hu Z. ^{[1
]}

Hou S. ^{[1
]}

机构：

[1] Institute of Modern Physics, Chinese Academy of Sciences

[2] Graduate University of Chinese Academy of Sciences

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2011年 / 31卷 / 03期

关键词：

Outgassing rate at high temperature; Residual gases; SPP method; Stainless steel;

D O I：

10.3969/j.issn.1672-7126.2011.03.23

中图分类号：

学科分类号：

摘要：

The outgassing rates of stainless steel (316L) surfaces at high temperatures were measured more accurately via modifying the method of switching between two pumping paths (SPP). The newly-developed technique outperforms the conventional one in two ways: first, the outgassing rates, originated from both the gauge tubes and the mass spectrometer is excluded; second, the variations in pressure due to different gauges are removed by considering only the pressure of one gauge in data processing. The SPP based technique was tested in the stainless steel vacuum chamber, filled with air and nitrogen, respectively. After baking under the same conditions, and filling with air and dry N2, respectively, the outgassing rates of the stainless steel surfaces, at room and/or high temperatures, were evaluated and compared.

引用

页码：368 / 371

页数：3