Study on precision finishing of PCD by constant-pressure grinding and UV-polishing

被引：0

作者：

Kumamoto University, 2-39-1, Kurokami, Kumamoto, 860-8555, Japan ^{[1
]}

机构：

[1] Kumamoto University, Kumamoto, 860-8555, 2-39-1, Kurokami

来源：

Key Eng Mat | 2009年 / 388-391期

关键词：

Grinding; PCD; Polishing; Ultraviolet ray irradiation;

D O I：

10.4028/www.scientific.net/KEM.407-408.388

中图分类号：

学科分类号：

摘要：

Polycrystalline diamond (PCD) has been widely used for various cutting tools and die components making use of its hardness and wear resistance properties. The polishing method of a single crystal diamond substrate and SiC using ultraviolet irradiation was newly developed to obtain mirror-finished surfaces. Due to the long polishing time in this method, a better pre-machined surface is required to shorten the total processing time. In this work, the constant-pressure grinding was performed using a cup type metal-bonded diamond wheel and a constant pressure device. After the good constant-pressure grinding, the PCD was finished by the polishing under the ultraviolet irradiation, and the microroughness was reached to be 0.71 nmRa. © (2009) Trans Tech Publications, Switzerland.

引用

页码：388 / 391

页数：3