Properties of films obtained by ion-beam sputtering

被引：0
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作者：
Muranova, G.A. [1 ]
Smirnov, N.N. [1 ]
机构：
[1] S. I. Vavilov Stt. Optical Institute, St. Petersburg, Russia
来源：
Journal of Optical Technology (A Translation of Opticheskii Zhurnal) | 2001年 / 68卷 / 04期
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摘要：
7
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页码：282 / 286
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