Replication of polymer microstructure in energy control mode using ultrasonic embossing

被引：0
作者：
Luo, Yi [1 ]
Ma, Yuhui [2 ]
Yan, Xu [1 ]
Qi, Na [2 ]
Wang, Xiaodong [1 ]
机构：
[1] Key Laboratory for Micro/Nano Technology and System of Liaoning Province (Dalian University of Technology), Dalian, 116024, Liaoning
[2] Key Laboratory for Precision and Non-Traditional Machining Technology of Ministry of Education (Dalian University of Technology), Dalian, 116024, Liaoning
来源：
Harbin Gongye Daxue Xuebao/Journal of Harbin Institute of Technology | 2015年 / 47卷 / 03期
关键词：
Energy control mode; Replication of polymer microstructure; Time control mode; Ultrasonic embossing;
D O I：
10.11918/j.issn.0367-6234.2015.03.018
中图分类号：
学科分类号：
摘要：
Ultrasonic embossing is a new replication technique for polymer microstructures, and it is difficult to control the embossing process, and the process window is very narrow. Aiming at solving this kind of problem, energy control mode for ultrasonic embossing is proposed in this paper. PMMA was selected as the substrate, and embossing experiments based on energy control mode and time control mode were carried out. The results show that, in the energy control mode, under the condition of heat-assisted temperature 65 ℃, ultrasonic pressure 400 N, ultrasonic amplitude 11.4 μm and ultrasonic energy range from 700 J to 1000 J, the depth replication rate was better than 92%. The temperature test experiments for heat affected zone show that, using the similar embossing parameters, the peak temperature in energy control mode is low and the temperature over the glass transition point is long. And this is the main reason for energy control mode has wider processing window which makes the process more controllable. ©, 2015, Harbin Institute of Technology. All right reserved.
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页码：103 / 106
页数：3
相关论文
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