On-Chip Infrared Spectroscopic Sensing: Redefining the Benefits of Scaling

被引:29
作者
Kita D.M. [1 ]
Lin H. [1 ]
Agarwal A. [1 ]
Richardson K. [2 ]
Luzinov I. [3 ]
Gu T. [1 ]
Hu J. [1 ]
机构
[1] Department of Materials Science and Engineering, Materials Processing Center, Massachusetts Institute of Technology, Cambridge, 02139, MA
[2] College of Optics and Photonics, CREOL, University of Central Florida, Orlando, 32816, FL
[3] Department of Materials Science and Engineering, Clemson University, Clemson, 29634, SC
基金
美国国家科学基金会;
关键词
Chemical sensors; infrared sensors; optical resonators; optical sensors; photothermal effects; spectroscopy;
D O I
10.1109/JSTQE.2016.2609142
中图分类号
学科分类号
摘要
Infrared (IR) spectroscopy is widely recognized as a gold standard technique for chemical analysis. Recent strides in photonic integration technologies offer a promising route towards enabling miniaturized, rugged platforms for IR spectroscopic analysis. Here we show that simple size scaling by replacing bulky discrete optical elements used in conventional IR spectroscopy with their on-chip counterparts is not a viable route for on-chip infrared spectroscopic sensing, as it cripples the system performance due to the limited optical path length accessible on a chip. In this context, we discuss two novel photonic sensor designs uniquely suited for microphotonic integration. We leverage strong optical and thermal confinement in judiciously designed microcavities to circumvent the thermal diffusion and optical diffraction limits in conventional photothermal sensors and achieve parts-per-billion level gas molecule limit of detection. In the second example, an on-chip spectrometer design with Fellgett's advantage is proposed for the first time. The design enables sub-nm spectral resolution on a millimeter-sized, fully packaged chip without mechanical moving parts. © 2016 IEEE.
引用
收藏
页码:340 / 349
页数:9
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