Cleaning multilayer dielectric pulse compressor gratings with top layer of HfO2 by Piranha solution

被引：7

作者：

Chen S. ^{[1
]}

Sheng B. ^{[1
]}

Qiu K. ^{[1
]}

Liu Z. ^{[1
]}

Xu X. ^{[1
]}

Liu Y. ^{[1
]}

Hong Y. ^{[1
]}

Fu S. ^{[1
]}

机构：

[1] National Synchrotron Radiation Laboratory, University of Science and Technology of China

来源：

Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams | 2011年 / 23卷 / 08期

关键词：

Contamination; Multilayer dielectric pulse compressor gratings; Piranha solution; Scanning electron microscope; X-ray photoelectron spectroscopy;

D O I：

10.3788/HPLPB20112308.2106

中图分类号：

学科分类号：

摘要：

In order to improve the resistance of multilayer dielectric pulse compressor gratings (PCGs) with top layer of HfO2 to laser damage, the residues including carbon fluorinated compounds and metal compounds containing fluorine, which are left on the surface of PCG during ion reactive etching of HfO2 with working gas of CHF3, have been cleaned by Piranha solution(the mixture of 98% H2SO4 and 30% H2O2). The parameters of Piranha solution cleaning, such as cleaning temperature, composition, cleaning time, and times of cleaning, were studied systematically. Scanning electron microscope(SEM) was presented to observe the grooves of PCG and X-ray photoelectron spectroscopy(XPS) was employed to evaluate different elements on the surface of PCG before and after cleaning. The removal mechanism of residual contaminants was analyzed. The experimental results show that higher removal efficiency can be achieved with more times of cleaning and higher cleaning temperature. In the cleaning active time of 60 minutes at the temperature of 90°C, the atomic fraction of residual fluorine on the surface of PCG which were cleaned for three times or more was close to 0.1% (the resolution limitation of XPS), when the volume ratio of H2SO4 to H2O2 was 2:1.

引用

页码：2106 / 2110

页数：4

共 17 条

[1] Wang G., Suggestion of neutron generation with powerful of lasers, Chinese Journal of Lasers, 14, 11, pp. 641-645, (1987)
[2] Tabak M., Hammer J., Glinsky M., Et al., Ignition and high gain with ultrapowerful lasers, Phys Plasmas, 1, 5, pp. 1626-1634, (1994)
[3] Kodama R., Norreys P.A., Mima K., Et al., Fast heating of ultrahigh-density plasma as a step towards laser fusion ignition, Nature, 412, pp. 798-802, (2001)
[4] Kodama R., Shiraga H., Shigemori K., Et al., Nuclear fusion: Fast heating scalable to laser fusion ignition, Nature, 418, pp. 933-934, (2002)
[5] Stlickland D., Mourou G., Compression of amplified chirped optical pulses, Opt Commun, 56, pp. 219-221, (1985)
[6] Maine P., Stlickland D., Bado P., Et al., Generation of ultrahigh peak power pulses by chirped pulse amplification, IEEE J Quantum Electron, 24, pp. 398-403, (1988)
[7] Liu W., Zhu Q., Feng G., Et al., Effects of non-parallel grating pair on pulse space-time profiles, High Power Laser and Particle Beams, 17, 10, pp. 1474-1478, (2005)
[8] Yang C., Ma P., Guided-mode resonance analysis of compressed grating with periodic stack structure, High Power Laser and Particle Beams, 19, 5, pp. 785-789, (2007)
[9] Britten J.A., Hoaglan C.R., Nissen J.D., Et al., Method for cleaning diffraction gratings
[10] Ashe B., Marshall K.L., Giacofei C., Et al., Evaluation of cleaning methods for multilayer diffraction gratings, Proc of SPIE, (2007)

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