Fabrication and Low Range Pressure Sensor Application of Polyimide Based Cr-N Thin Film Strain Gauge Element

被引：0

作者：

Sasaki, Yoshihiro ^{[1
]}

Niwa, Eiji ^{[1
]}

机构：

[1] Research Institute for Electromagnetic Materials, 9-5-1, Narita, Miyagi, Tomiya

来源：

IEEJ Transactions on Sensors and Micromachines | 2024年 / 144卷 / 11期

关键词：

Cr-N; polyimide; pressure sensor; strain gauge; strain sensitive thin film;

D O I：

10.1541/ieejsmas.144.375

中图分类号：

学科分类号：

摘要：

We have developed a Cr-N alloy thin film showing a gauge factor (Gf) of about 10 and a temperature coefficient of resistivity (TCR) of about zero, which is expected as a new strain gauge material in the next generation. In this study, we have investigated the fabrication of polyimide-based Cr-N thin films and the pressure sensor application for very low pressure range using the films. We have found out that the usable crack free Cr-N thin films were obtained on polyimide bases due to using the lower spattering gas pressure, and also enabled to detect the very low range pressure of 1-30kPa sensitively. © 2024 The Institute of Electrical Engineers of Japan.

引用

页码：375 / 383

页数：8

共 20 条

[1]

72, 4, pp. 5-11, (2002)

[2]

(1968)

[3]

pp. 43-44, (2007)

[4]

(2019)

[5]

Kester W., Strain, Force, Pressure and Flow Measurements, Op Amp Applications Handbook, pp. 247-256, (2005)

[6]

63, 6, pp. 61-65, (1993)

[7]

Niwa E., Sasaki Y., Cr-N strain sensitive thin films and their pressure sensor applications, IEEJ Transactions on Sensors and Micromachines, 134, 12, pp. 385-391, (2014)

[8]

Furuta A., Munekata M., Higuchi T., Precise positioning stage driven by multilayer piezo actuator using strain gauge, Jpn. J. Appl. Phys, 41, 10, pp. 6283-6286, (2002)

[9]

pp. 35-40, (2006)

[10]

5, pp. 113-114, (2009)

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