RF MEMS switches with bias physically insulated from microwave signals

被引：0
|
作者：
Zhu, Jian
Yu, Yuanwei
Lu, Le
Jia, Shixing
Zhang, Long
Zhou, Bailing
机构：
[1] Southeast University, Nanjing 210096, China
[2] Nanjing Electronic Devices Institute, Nanjing 210016, China
来源：
Zhongguo Jixie Gongcheng/China Mechanical Engineering | 2005年 / 16卷 / 14期
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学科分类号：
摘要：
Four kinds of MEMS switches were present, with bias electrodes physically insulated from RF/microwave transmission line, which were designed for lower crosstalk between bias and microwave signals. The mechanical structure of these switches was optimized by electromechanical coupling analysis of IntelliSuite(r) software. The RF/microwave performances of these switches were optimized by 2.5 dimensional electromagnetic (EM) field-solvers of ADS/Momentum. The optimized design consists of fine tuning structural parameters and adjusting the bias electrodes.
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页码：1254 / 1258
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