Calculation of removal function of ion beam figuring and polishing experiment

被引：5
|
作者：
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun [1 ]
130033, China
不详 [2 ]
100049, China
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来源：
Guangxue Jingmi Gongcheng | / 1卷 / 31-39期
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D O I：
10.3788/OPE.20152301.0031
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