Calculation of removal function of ion beam figuring and polishing experiment

被引：5
|
作者：
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun [1 ]
130033, China
不详 [2 ]
100049, China
机构：
来源：
Guangxue Jingmi Gongcheng | / 1卷 / 31-39期
关键词：
D O I：
10.3788/OPE.20152301.0031
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] In-situ Fast Calculation of Removal Function for Ion Beam Polishing and Polishing Experiment
    Zhang, Xu
    Wang, Dasen
    Xia, Chaoxiang
    Guo, Hailin
    Huang, Siling
    Zhao, Shiyan
    Nie, Fengming
    Surface Technology, 2024, 53 (20): : 158 - 165
  • [2] Optimum removal in ion-beam figuring
    Zhou, Lin
    Dai, Yifan
    Xie, Xuhui
    Li, Shengyi
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2010, 34 (03): : 474 - 479
  • [3] Stability Analysis of Ion Beam Figuring Removal Function Based on Line Scan
    Zhang, Xu
    Wang, Chunyang
    Wang, Dasen
    Nie, Fengming
    Li, Xiaojing
    Feng, Shi
    THIRD INTERNATIONAL CONFERENCE ON PHOTONICS AND OPTICAL ENGINEERING, 2019, 11052
  • [4] Research on material removal accuracy analysis and correction of removal function during ion beam figuring
    Wu, Weibin
    Dai, Yifan
    Zhou, Lin
    Xu, Mingjin
    OPTICAL ENGINEERING, 2016, 55 (09)
  • [5] Ion Beam Polishing Equivalent Removal and Polishing Experiments
    Wang Yuning
    Jiang Shilei
    Sun Guobin
    Liu Weiguo
    Dang Xiaogang
    LASER & OPTOELECTRONICS PROGRESS, 2020, 57 (03)
  • [6] Stability of Ion Beam Polishing Removal Function on Fused Silica Surface
    Wu P.-F.
    Wang C.-Y.
    Li X.-J.
    Zhao S.-Y.
    Wang D.-S.
    Nie F.-M.
    Surface Technology, 2022, 51 (04): : 284 - 291
  • [7] Ultra-precision Surface Polishing using Ion Beam Figuring
    Ghim, Young-Sik
    You, Shin-Jae
    Rhee, Hyug-Gyo
    Yang, Ho-Soon
    Lee, Yun-Woo
    6TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES, 2012, 8416
  • [8] Polishing an off-axis aspheric mirror by ion beam figuring
    Wang Yonggang
    Dai Chen
    Li Wenqin
    Meng Xiaohui
    Dong Huiwen
    Wang Peng
    ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES, 2016, 9683
  • [9] FIGURING MINIATURE ASPHERICS - ION POLISHING
    KARGER, AM
    APPLIED OPTICS, 1973, 12 (03): : 451 - 459
  • [10] Polishing silicon modification layer on silicon carbide surface by ion beam figuring
    Deng, Weijie
    Chinese Optics Letters, 2014, 12
12345