Actuation properties of lead zirconate titanate thick films structured on Si membrane by the aerosol deposition method

被引：0
作者：
Lebedev, Maxim [1 ,3 ]
Akedo, Jun [1 ]
Akiyama, Yoshikazu [2 ]
机构：
[1] Mechanical Engineering Laboratory, A.I.S.T., M.I.T.I., Tsukuba, Ibaraki 305-8564
[2] R and D Center, RICOH Co., Ltd., Tsuzuki, Yokohama 224-0035
[3] JST Cooperative Researcher, Kawaguchi, Saitama 332-0012
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2000年 / 39卷 / 9 B期
关键词：
Deposition - Interferometers - Laser applications - Lead compounds - Microactuators - Natural frequencies - Semiconducting silicon - Substrates - Thick films;
D O I：
10.1143/jjap.39.5600
中图分类号：
学科分类号：
摘要：
The results of the direct deposition of lead zirconate titanate [Pb(Zr0.52, Ti0.48)O3] (PZT) thick film on a Si-based structure are presented. The construction of a bottom electrode is very important for successful deposition. The actuation properties of PZT on the Si membrane were investigated. For a 6.2 × 6.1 mm2, 65-μm-thick Si membrane driven by a 4.7 × 4.3 mm2, 13-μm-thick PZT layer, the deflections, which were 1.5 μm upon applying 52 V at nonresonance frequency and 22 μm upon applying 8 V at resonance frequency, were measured.
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页码：5600 / 5603
页数：3
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