Microstructures and mechanical behavior of TiAlN coatings on borosilicate glass

被引：0

作者：

Wang, Rui ^{[1
]}

Li, Jinlong ^{[1
]}

Wang, Yongxin ^{[1
]}

Hu, Jianmin ^{[1
]}

Wang, Liping ^{[1
]}

Wu, Haizhong ^{[1
]}

机构：

[1] Zhejiang Key Laboratory of Marine Materials and Protection Technology, Ningbo Institute of Materials Technology and Engineering, China Academy of Sciences, Ningbo

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2014年 / 34卷 / 09期

关键词：

Borosilicate glass; Magnetron sputtering; Properties; Structure; TiAlN/SiN film;

D O I：

10.13922/j.cnki.cjovst.2014.09.14

中图分类号：

学科分类号：

摘要：

The TiAlN/SiN coatings, deposited by continuous magnetron sputtering on substrate of borosilicate glass, were oxidized at a high temperature. The impact of the oxi dation temperature on the TiAlN/SiN coatings was investigated. The microstructure s and mechanical properties of the TiAlN/SiN coatings were characterized with X-ray diffraction, scanning electron microscopy, atomic force microscopy, and nano-indenter G200. Protected by a 67 nm thick, compact amorphous SiN layer, the 109 nm thick TiAlN coating consists of columnar grains. The results show that the oxida tion temperature strongly affects the mechanical properties of the coatings. For instance, as the oxidation temperature rose up, the surface hardness of the TiAlN/ SiN coating increased, even up to 20 GPa. When it comes to toughness and wearres istance, the TiAlN/SiN outperforms the TiAlN coatings. Moreover, oxidized up to 700℃, the black level of the TiAlN/SiN coatings remained unchanged. ©, 2014, Science Press. All right reserved.

引用

页码：956 / 960

页数：4

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