Magnetic and structural properties of FePt thin film prepared by rapid thermal annealing

被引:0
作者
Itoh, Yuji [1 ]
Takeuchi, Makoto [1 ]
Tsukamoto, Arata [1 ]
Nakagawa, Katsuji [1 ]
Itoh, Aldyoshi [1 ]
Katayama, Toshikazu [2 ]
机构
[1] Dept. of Electronics and Comp. Sci., College of Science and Technology, Nihon University, 7-24-1 Narashinodai, Funabashi 274-8501, Japan
[2] College of Pharmaceutical Sciences, Toho University, 2-2-1 Miyama, Funabashi 274-8510, Japan
来源
Japanese Journal of Applied Physics, Part 2: Letters | 2002年 / 41卷 / 10 A期
关键词
Fabrication - Film preparation - Grain size and shape - Iron compounds - Magnetic anisotropy - Magnetization - Multilayers - Oxidation - Rapid thermal annealing - Substrates - Transmission electron microscopy;
D O I
10.1143/jjap.41.l1066
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学科分类号
摘要
We fabricated the FePt film on thermal oxidized Si substrate by rapid thermal annealing (RTA), and investigated the order parameter and the orientation parameter as a function of annealing temperature. We also observed grains by a transmission electron microscope (TEM). The joining of the grains begins at between 300°C and 400°C, and this is the threshold for obtaining highly (001) oriented FePt films. We also clarify the difference in the magnetization and the structure between the films annealed from Pt/Fe (Fe-first) and from Fe/Pt (Pt-first) multilayers as the starting materials. The film annealed from the Fe-first multilayers has the perpendicular magnetization showing higher (001) orientation and magnetic anisotropy than the film annealed from the Pt-first multilayers.
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