共 50 条
- [31] Time-grating angular displacement dynamic error suppression method based on AKF filter Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2023, 44 (04): : 259 - 270
- [35] An absolute displacement measurement method of simple graphic decimal shift encoding 2019 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS, 2020, 11439
- [37] Displacement measurement error of grating interferometer based on vector diffraction theory Hongwai yu Jiguang Gongcheng/Infrared and Laser Engineering, 2024, 53 (02):
- [38] Heterodyne grating interferometry based on sinusoidal phase modulation for displacement measurement OPTICAL MEASUREMENT SYSTEMS FOR INDUSTRIAL INSPECTION X, 2017, 10329
- [39] Displacement measurement technology of nano grating sensor based on HHT algorithm MICROELECTRONICS JOURNAL, 2021, 109 (109):
- [40] An Interference Signal Processing Method for Displacement Measurement by Dual Wavelength and Single Grating SEVENTH INTERNATIONAL SYMPOSIUM ON PRECISION ENGINEERING MEASUREMENTS AND INSTRUMENTATION, 2011, 8321