Oxidation behavior of (TiFeCr)N multi-component films

The high-temperature oxidation behavior of (Fe + Cr) modified (TiFeCr)N films was investigated. The results show that the mass gains of the multi-component films at the higher oxidation temperatures, over 600 °C, were lower than those of TiN films. There was no local spallation similar to TiN films after treatment at 800 °C for 1 h. The substrates had no evident effect on oxidation products of multi-component films. Multi-component films on the two substrate transformed into TiO2(Rutile) after the treatment at 700 °C for 1 h. However the substrate had an evident effect on that of TiN films. The transformed products of TiN films on copper substrate consisted of TiO2(Rutile) and a few Ti3O5, while these on glass substrate consisted of Ti3O5 and a few TiO2.