Self-sensing piezoelectric micro-gripper

被引：1
作者：
Cui, Yu-Guo [1 ,2 ]
Zheng, Jun-Hui [1 ,2 ]
Ma, Jian-Qiang [1 ,2 ]
Cai, Cheng-Bo [1 ,2 ]
机构：
[1] Faculty of Mechanical Engineering and Mechanics, Ningbo University, Ningbo
[2] Zhejiang Provincial Key Laboratory of Part Rolling Technology, Ningbo University, Ningbo
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2015年 / 23卷 / 07期
关键词：
Finger displacement; Gripping force; Integral charge; Piezoelectric micro-gripper; Self-sensing;
D O I：
10.3788/OPE.20152307.1996
中图分类号：
学科分类号：
摘要：
A self-sensing method was utilized to acquire the finger displacement and gripping force of a piezoelectric micro-gripper without micro-displacement and micro-force sensors. As the surface of piezoelectric ceramic wafer will generate free charges when it deforms under the external voltage and external force, a self-sensing method based on integral charges was proposed for sensing the finger displacement and gripping force. According to Jan G. Smits's piezoelectric cantilever bending deformation theory, the self-sensing formulas of the finger displacement and gripping force were derived, namely, the free charges on the surface of the piezoelectric ceramic wafer were used to represent the finger displacement and gripping force. Then an integral circuit was designed to acquire the surface free charges. The balance condition of self-sensing circuit was derived, which was that the product of the equivalent capacitance and leakage resistance of the piezoelectric crystals should be equal to that of the integrating capacitor and balancing resistor. Self-sensing experimental results indicate that the maximum error of modified self-sensing displacement is 0.78 μm for the finger displacement of 31.59 μm. The maximum error of modified self-sensing gripping force is 0.24 mN for the gripping force of 35.91 mN. Those experimental results show that the proposed self-sensing method is effective to detect the finger displacement and the gripping force. ©, 2015, Chinese Academy of Sciences. All right reserved.
引用
收藏
页码：1996 / 2004
页数：8
相关论文
共 15 条
[1]  
Sun L.N., Chen L.G., Rong W.B., Et al., Key techniques of micromanipulation devices for MEMS assembling and packaging, Chinese Journal of Mechanical Engineering, 44, 11, pp. 13-19, (2008)
[2]  
Chen L.G., Liu B.X., Development of hybrid-type MEMS microgripper, Opt. Precision Eng., 17, 8, pp. 1928-1934, (2009)
[3]  
Hao Y.P., Dong F.L., Zhang J.Y., Et al., Study on micro-gripper on MEMS mechanism assembly, China Mechanical Engineering, 25, 5, pp. 596-601, (2014)
[4]  
Cai J.H., Huang X.H., Lu X.D., Et al., A micro-force sensing integrated piezoelectric microgripper, Robot, 28, 1, pp. 59-64, (2006)
[5]  
Xu Q., A new compliant microgripper with integrated position and force sensing, Advanced Intelligent Mechatronics (AIM), 2013 IEEE/ASME International Conference on, pp. 591-596, (2013)
[6]  
Yu D.H., Luo W.R., Wu M., Et al., Design of the micro-gripper used for semi-automatic assembly system of ICF targets based on finite element analysis, Transducer and Microsystem Technologies, 30, 4, pp. 120-123, (2011)
[7]  
Wu J.J., Li Y., Li D.Sh., Et al., Design and calibration of 3D micro tactile probe based on MEMS capacitance sensor, Opt. Precision Eng, 20, 12, pp. 3087-3094, (2013)
[8]  
Rakotondrabe M., Ivan I.A., Development and force/position control of a new hybrid thermo-piezoelectric microgripper dedicated to micromanipulation tasks, Automation Science and Engineering, IEEE Transactions on, 8, 4, pp. 824-834, (2011)
[9]  
Xi W.M., Zhong H., Micro-tweezer technology driven by electromagnetic force, Nanotechnology and Precision Engineering, 6, 3, pp. 195-198, (2008)
[10]  
Kim D.H., Kim B., Kang H., Development of a piezoelectric polymer-based sensorized microgripper for microassembly and micromanipulation, Microsystem Technologies, 10, pp. 275-280, (2004)
12