Mass Production Technology for High-performance Piezoelectric Thin Films for MEMS Devices

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Journal of the Institute of Electrical Engineers of Japan | 2024年 / 144卷 / 02期
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D O I：
10.1541/ieejjournal.144.80
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[No abstract available]
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页码：80 / 83
页数：3
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Trolier-Mckinstry S., Muralt P., Thin film Piezoelectrics for MEMS, Journal of Electroceramics, 12, (2004)
[4]  
Suu K., Thin-film Processing Technologies of Piezoelectric Materials for IoT/IoE Applications, 10th International Conference on Materials for Advanced Technologies, (2019)
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