NGL: Forever next-generation?

被引：0
|
作者：
Hand, Aaron
机构：
来源：
Semiconductor International | 2002年 / 25卷 / 06期
关键词：
Bandwidth - Calcium compounds - Customer satisfaction - Industrial plants - Irradiation - Light sources - Lithography - Microprocessor chips - Printing - Production - Projection systems - Surface roughness;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
Various aspects of the next generation lithography (NGL) are discussed. The Semicondustor International has decided to conduct a survey of the needs and expectations for the NGL. There are about 10 machines worldwide using 193nm lithography in a production environment. The non optical techniques has viability for a given process node and the optical lithography has surprassed it in technical viability. It is found that maskless or e-beam lithography has slow down the volume production of semiconductors .
引用
收藏
页码：57 / 64
相关论文
共 50 条
  • [31] The next-generation Internet
    Metcalfe, B
    IEEE INTERNET COMPUTING, 2000, 4 (01) : 58 - 59
  • [32] Next-generation phylogenomics
    Chan, Cheong Xin
    Ragan, Mark A.
    BIOLOGY DIRECT, 2013, 8
  • [33] Next-Generation Batteries
    Chou, Shu-Lei
    Dou, Shi-Xue
    ADVANCED MATERIALS, 2017, 29 (48)
  • [34] Next-generation transportation
    不详
    AMERICAN CERAMIC SOCIETY BULLETIN, 2003, 82 (07): : 8 - 8
  • [35] TEACHING THE NEXT-GENERATION
    WESTMORE, A
    SEARCH, 1993, 24 (04): : 114 - 115
  • [36] THE NEXT-GENERATION IN AHAS
    WHEELER, CD
    SOAP COSMETICS CHEMICAL SPECIALTIES, 1995, 71 (02): : 24 - &
  • [37] Next-generation CRISPRs
    Rusk, Nicole
    NATURE METHODS, 2015, 12 (01) : 36 - 36
  • [38] Next-Generation Sequencing
    Le Gallo, Matthieu
    Lozy, Fred
    Bell, Daphne W.
    MOLECULAR GENETICS OF ENDOMETRIAL CARCINOMA, 2017, 943 : 119 - 148
  • [39] Next-Generation Genomics
    不详
    SCIENCE, 2010, 330 (6011) : 1606 - 1606
  • [40] TSH - THE NEXT-GENERATION
    FAIX, J
    JOURNAL OF CLINICAL IMMUNOASSAY, 1994, 17 (04): : 197 - 197
12345