Technique for monolithic fabrication of microlens arrays integrated with infrared CCD

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作者
Chen, Sihai [1 ]
Yi, Xinjian [2 ]
Wang, Hongchen [3 ]
He, Miao [3 ]
机构
[1] Dept. of Optoelectron. Eng., Huazhong Univ. of Sci. and Technol., Wuhan 430074, China
[2] Lab. for Image Info., Huazhong Univ. of Sci. and Technol., Wuhan 430074, China
[3] Lab. for Laser Technol., Huazhong Univ. of Sci. and Technol., Wuhan 430074, China
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Diffractive microlens arrays - Monolithic integration;
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页码:356 / 358
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