Formation of crystalline heteroepitaxial SiC films on Si by carbonization of polyimide Langmuir-Blodgett films

被引：0

作者：

Luchinin, Viktor V. ^{[1
]}

Goloudina, Svetlana I. ^{[1
]}

Pasyuta, Vyacheslav M. ^{[1
]}

Panov, Mikhail F. ^{[1
]}

Smirnov, Alexander N. ^{[2
]}

Kirilenko, Demid A. ^{[2
]}

Semenova, Tatyana F. ^{[3
]}

Sklizkova, Valentina P. ^{[4
]}

Gofman, Iosif V. ^{[4
]}

Svetlichnyi, Valentin M. ^{[4
]}

Kudryavtsev, Vladislav V. ^{[4
]}

机构：

[1] St. Petersburg State Electrotechnical University, St. Petersburg,197376, Russia

[2] Ioffe Institut, RAS, St. Petersburg,194021, Russia

[3] St. Petersburg State University, St. Petersburg,199034, Russia

[4] Institute of Macromolecular Compounds, RAS, St. Petersburg,199004, Russia

来源：

Japanese Journal of Applied Physics | 2017年 / 56卷 / 06期

关键词：

549.3 Nonferrous Metals and Alloys excluding Alkali and Alkaline Earth Metals - 741.3 Optical Devices and Systems - 801 Chemistry - 802.2 Chemical Reactions - 804.2 Inorganic Compounds - 813.2 Coating Materials - 815.1.1 Organic Polymers - 933.1 Crystalline Solids;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

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