Crystal structure of oxygen/nitrogen-doped GeSbTe phase-change media: Investigation using grazing incidence X-ray diffraction

被引：0

作者：

Takase, Aya ^{[1
,2
,3
,4
]}

Fujinawa, Go ^{[1
,2
,3
]}

Ebina, Atsushi ^{[1
,2
,3
]}

Hirasaka, Masao ^{[1
,2
,3
]}

Sugiyama, Ikuto ^{[1
,2
,3
]}

机构：

[1] Application Laboratory, Rigaku Corporation, 3-9-12 Matsubara-cho, Akishima, Tokyo 196-8666, Japan

[2] Technical and Development Section, Recording Media Mihara Factory, Teijin Limited, 1-1-1 Enichi-cho, Mihara, Hiroshima 723-8611, Japan

[3] Polymer Research Center, Teijin Limited, 2-1-1 Uchisaiwai-cho, Chiyoda-ku, Tokyo 100-8585, Japan

[4] Recording Media Division, Teijin Limited, 2-1-1 Uchisaiwai-cho, Chiyoda-ku, Tokyo 100-8585, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 04期

关键词：

Composition effects - Crystal structure - Doping (additives) - Lattice constants - Nitrogen - Oxygen - Phase transitions - Strain - Thin films - X ray diffraction analysis;

D O I：

10.1143/jjap.41.2189

中图分类号：

学科分类号：

摘要：

The effects of oxygen- and nitrogen-dopings on the crystal structure of GeSbTe recording layers of phase-change media were studied by X-ray diffraction. A high resolution grazing incidence X-ray diffraction optics using a laboratory X-ray source was developed to quantitatively analyze the crystal structure of thin film materials. Lattice parameter, crystallite size, and lattice strain were determined from diffraction profiles.

引用

页码：2189 / 2190