Atomic force microscope (AFM) for semiconductor process evaluation

被引：0
|
作者：
Anon
机构：
来源：
Hitachi Review | 2002年 / SPEC期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
No abstract available
引用
收藏
相关论文
共 50 条
  • [41] SIMULTANEOUS IMAGING OF A GRAPHITE SURFACE WITH ATOMIC FORCE SCANNING TUNNELING MICROSCOPE (AFM STM)
    SUGAWARA, Y
    ISHIZAKA, T
    MORITA, S
    JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (08): : 1539 - 1543
  • [42] Dynamic analysis of tapping mode atomic force microscope (AFM) for critical dimension measurement
    Xiang, Wuweikai
    Tian, Yanling
    Liu, Xianping
    PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY, 2020, 64 (64): : 269 - 279
  • [43] Regiospecific orientation of single-chain antibody and atomic force microscope (AFM) images
    Yun K.
    Park S.
    Pyo H.
    Kim S.
    Lee S.
    Biotechnology and Bioprocess Engineering, 1999, 4 (1) : 72 - 77
  • [44] A concept for automated nanoscale atomic force microscope (AFM) measurements using a priori knowledge
    Recknagel, C.
    Rothe, H.
    MEASUREMENT SCIENCE AND TECHNOLOGY, 2009, 20 (08)
  • [45] The Study on the Aspect Ratio of Atomic Force Microscope (AFM) Measurements for Triangular Silicon Nanowire
    Za'bah, Nor F.
    Kwa, Kelvin S. K.
    O'Neill, Anthony
    2013 IEEE REGIONAL SYMPOSIUM ON MICRO AND NANOELECTRONICS (RSM 2013), 2013, : 223 - 226
  • [46] Study on a measuring method for cutting edges of diamond tools by atomic force microscope(AFM)
    Sun, Tao
    Tan, Jiubin
    Dong, Shen
    Yi Qi Yi Biao Xue Bao/Chinese Journal of Scientific Instrument, 2000, 21 (01): : 54 - 57
  • [47] Cohesion property of polymer aggregates in resist pattern analyzed by atomic force microscope (AFM)
    Kawai, A
    JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, 2002, 15 (03) : 371 - 376
  • [48] Atomic force microscope
    不详
    MICRO, 1995, 13 (10): : 22 - 22
  • [49] THE ATOMIC FORCE MICROSCOPE
    GOH, MC
    MARKIEWICZ, P
    CHEMISTRY & INDUSTRY, 1992, (18) : 687 - 691
  • [50] ATOMIC FORCE MICROSCOPE
    TSUDA, N
    INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING, 1991, 25 (04): : 253 - 258
12345