Closed-loop control for deflection of photovoltaic-electrostatic cantilever beam

被引:0
|
作者
Tang, Yujuan [1 ]
Qiao, Kun [2 ]
Yang, Zhong [1 ]
Wang, Xinjie [2 ]
机构
[1] Jinling Institute of Technology, China
[2] Nanjing University of Science and Technology, China
基金
中国国家自然科学基金;
关键词
Photovoltaic effects - Ceramic materials - Electrostatic actuators - Closed loop control systems - Deflection (structures) - Electrostatics - Remote control - Copper - Mechanical actuators - MEMS - Cantilever beams;
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中图分类号
学科分类号
摘要
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页码:187 / 195
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