Microstructures and stoichiometrics of indium-tin-oxide films

被引：0

作者：

Cai, Qi ^{[1
]}

Cao, Chunbin ^{[2
]}

Jiang, Xishun ^{[3
]}

Song, Xueping ^{[1
]}

Sun, Zhaoqi ^{[1
]}

机构：

[1] School of Physics and Material Science, Anhui University, Hefei 230039, China

[2] School of Science, Anhui Agricultural University, Hefei 230036, China

[3] Department of Electronics and Information Engineering, Chuzhou College, Chuzhou 239012, China

来源：

Zhenkong Kexue yu Jishu Xuebao/Journal of Vacuum Science and Technology | 2007年 / 27卷 / 03期

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引用

页码：195 / 199