Changes of surface properties of glass surfaces with gas cluster ion beam treatment

被引:0
|
作者
Zhang H.
机构
来源
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering | 2016年 / 82卷 / 04期
关键词
Deposition of hard diamond-like carbon films; Friction property; Gas cluster ion beam; Surface energy; Surface roughness; Surface treatment;
D O I
10.2493/jjspe.82.325
中图分类号
学科分类号
摘要
[No abstract available]
引用
收藏
页码:325 / 328
页数:3
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