Fault detection of multimode processes based on second order difference quotient LPP

被引：0

作者：

Guo J.-Y. ^{[1
]}

Wang D.-Q. ^{[1
]}

Li Y. ^{[1
]}

机构：

[1] College of Information Engineering, Shenyang University of Chemical Technology, Shenyang

来源：

Gao Xiao Hua Xue Gong Cheng Xue Bao/Journal of Chemical Engineering of Chinese Universities | 2020年 / 34卷 / 01期

关键词：

Fault detection; Locality preserving projections; Multimode processes; Second order difference quotient;

D O I：

10.3969/j.issn.1003-9015.2020.01.023

中图分类号：

学科分类号：

摘要：

In order to improve the fault detection performance of locality preserving projections (LPP) algorithm in multimode processes where dispersion degree of different modes varies greatly, a fault detection method based on second order difference quotient LPP (SODQ-LPP) was proposed. It was first used to preprocess the training data of multimode processes to eliminate variance difference between modes. The LPP algorithm was then used for dimensionality reduction and feature extraction. The statistics of the samples was calculated, and kernel density estimation (KDE) was used to determine the control limits. The new validation sample was projected onto the LPP model after the second order difference quotient preprocessing. The statistics of the new data was calculated and compared with the control limits for fault detection. Finally, simulation results of a multimodal numerical example and semiconductor process data were used to verify the effectiveness of the algorithm. © 2020, Editorial Board of Journal of Chemical Engineering of Chinese Universities". All right reserved."

引用

页码：182 / 189

页数：7

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