[1] Harbin Inst Technol, Sch Mat Sci & Engn, Harbin 150001, Peoples R China
[2] Harbin Inst Technol, Natl Key Lab Precis Hot Proc Met, Harbin 150001, Peoples R China
[3] Minist Educ, Key Lab Microsyst & Microstruct Mfg, Harbin 150001, Peoples R China