Thermo-mechanical and Control Behaviour of Copper-based Shape Memory Alloy Bimorph Actuator towards the Development of Micro Positioning System

被引：7
作者：
Muralidharan, M. [1 ]
Jayachandran, S. [1 ]
Yogeshwaran, M. [2 ]
Shivaani, A. S. [2 ]
Palani, I. A. [1 ]
机构：
[1] Indian Inst Technol Indore, Simrol 453552, India
[2] Bannari Amman Inst Technol, Mechatron Engn, Sathyamangalam 638401, India
来源：
DEFENCE SCIENCE JOURNAL | 2020年 / 70卷 / 06期
关键词：
Bimorph actuator; Shape memory alloy; MEMS; Mechatronics; Micro positioning; PID control; LIFE-CYCLE BEHAVIOR; THIN-FILMS; NITI; POLYIMIDE; THICKNESS;
D O I：
10.14429/dsj.70.15516
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
A shape memory alloy (SMA) bimoiph actuator is a composite structure composed of flexible polyimide substrate and SMA thin film deposited using thermal evaporation technique. In this work, the substrate thickness in the range of 25 - 75 mu m was selected for the development of CuAlNiMn SMA bimorph actuator. An investigation on the control behavior of copper based SMA bimoiph towards the development of micro positioning system has been performed. The actuation behavior of the SMA bimoiph was studied using electrical actuation. Subsequently, a proportional integral derivative (PID) controller was designed to control the bimorph actuator with proper tuning of gain parameters. The displacement of the bimorph actuator was controlled through dedicated experimental setup consisted of laser displacement sensor, data acquisition system and Lab VIEW software. The CuAlNiMn SMA bimorph actuator resulted in a satisfying control performance which can be extended to MEMS applications. A preliminary prototype of the SMA bimorph actuator based micro positioning system has been developed.
引用
收藏
页码：664 / 671
页数：8
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