Advances in femtosecond laser fabrication of microchannels

被引：0

作者：

Tsai, Hai-Lung ^{[1
,2
]}

Yan, Xue-Liang ^{[2
]}

Wang, Su-Mei ^{[2
]}

Xia, Bo ^{[2
]}

Liu, Peng-Jun ^{[2
]}

Jiang, Lan ^{[2
]}

机构：

[1] Department of Mechanical and Aerospace Engineering, Missouri University of Science and Technology, Rolla, Missouri, USA 65409, United States

[2] Key Laboratory of Fundamental Science for Advanced Machining, Beijing Institute of Technology, Beijing 100081, China

来源：

Beijing Ligong Daxue Xuebao/Transaction of Beijing Institute of Technology | 2012年 / 32卷 / 10期

关键词：

Microchannels;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Major progresses in mechanism investigations and methodology developments in femtosecond laser fabrication of microchannels are reviewed, especially for femtosecond laser irradiation followed by chemical etching and liquid-assisted femtosecond laser drilling. In addition, key challenges and possible future research trends are briefly discussed.

引用

页码：991 / 1003