Design of minimal capacitance detect circuit for MEMS capacitive sensor

被引：0

作者：

Hao, Qu ^{[1
]}

Yu, Huijun ^{[1
]}

Wu, Zhou ^{[1
]}

He, Xiaoping ^{[2
]}

Du, Lianming ^{[2
]}

Bei, Peng ^{[1
]}

机构：

[1] Department of Mechatronics Engineering, University of Electronic Science and Technology of China, Chengdu

[2] Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang

来源：

Key Engineering Materials | 2015年 / 645卷

关键词：

Capacitance measurement; Comb Accelerometer Sensor; MEMS;

D O I：

10.4028/www.scientific.net/KEM.645-646.824

中图分类号：

学科分类号：

摘要：

The capacitance among the structure of the accelerometer is rather small, usually at sub-pF level. Detection of the capacitance among the sensor's tiny structure and analysis of the variation of these capacitances are necessary to improve the sensor's performance. In this paper, one capacitance detect circuit for minimal capacitance is designed. Simulation and experiment results indicate a good linearity when the circuit is applied to detect capacitance range from 0.5pF to 5pF. © (2015) Trans Tech Publications, Switzerland.

引用

页码：824 / 829

页数：5

共 13 条

[1]

Huang S.M., Et al., Electronic transducers for industrial measurement of low value capacitances, Journal of Physics E: Scientific Instruments on, 21, 3, (1988)

[2]

Song S., Zhou D., High Frequency Electronic Circuit, (2010)

[3]

Stephen D., Senturia Microsystem Design, (2001)

[4]

Kevin B., Methods of accurately measuring capacitive rh sensors (ishm 2006, 5th Intermational Symposium on Humidity and Moisture, (2006)

[5]

Arfah N., Zahirul Alam A.H.M., Khan S., Capacitance-to-voltage converter for capacitance measuring system, Mechatronics (ICOM 2011 4th International Conference on IEEE, (2011)

[6]

Zahirul Alam A.H.M., Nurul A., Khan S., Md R.Islam., Design of capacitance to voltage converter for capacitive sensor transducer, American Journal of Applied Sciences on, 7, 10, pp. 1353-1357, (2010)

[7]

Nurul A., Zahirul Alam A.H.M., Khan S., Design of capacitive measuring systems for high frequency band sensor transducer, Computer and Communication Engineering (ICCCE), 2010 International Conference on IEEE, (2010)

[8]

Lotters J.C., Olthuis W., Veltink P.H., A sensitive differential capacitance to voltage converter for sensor applications, Instrumentation and Measurement IEEE Transactions on, 48, 1, pp. 89-96, (1999)

[9]

Wenying M., The Design and Research of the Detection Circuit for A New Micromachined Capacitive Accelerometer, pp. 31-34, (2007)

[10]

Blair D.P., Sydenham P.H., Phase sensitive detection as a means to recover signals buried in noise, Journal of Physics E: Scientific Instruments, 8, 8, pp. 621-627, (1975)

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