Substrate Effects in GaN-on-Silicon RF Device Technology

The influence of the semiconducting Si substrate on the performance of GaN-on-Si RF technology is reviewed. Firstly, the formation of a parasitic conduction channel at the substrate-epitaxy interface is discussed in terms of its physical mechanism and its influence on RF loss, followed by schemes to minimize this effect. Secondly, it is shown that the presence of the parallel channel serves to backbias the III-nitride epitaxial stack and lead to current collapse even on the highly-resistive Si substrates used for RF device fabrication, analogous to GaN-on-doped Si power devices. Strategies to mitigate this issue are also presented and critically compared. Thirdly, thermal generation of carriers in Si at elevated operating temperatures leading to increased substrate loss is quantified, also followed by a discussion of possible techniques to reduce its influence on RF loss. © 2019 World Scientific Publishing Company.