Computer modeling of single-layer nanocluster formation in a thin SiO2 layer buried in Si by ion mixing and thermal phase decomposition

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作者：
Prüfer, Thomas [1 ]
Möller, Wolfhard [1 ]
Heinig, Karl-Heinz [1 ]
Wolf, Daniel [1 ,2 ]
Engelmann, Hans-Jürgen [1 ]
Xu, Xiaomo [1 ]
Von Borany, Johannes [1 ]
机构：
[1] Helmholtz-Zentrum Dresden-Rossendorf, Dresden, Saxony,01328, Germany
[2] Leibniz Institute for Solid State and Materials Research, Dresden, Saxony,01069, Germany
来源：
Journal of Applied Physics | 2019年 / 125卷 / 22期
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