[1] Institute of Semiconductors, Chinese Academy of Sciences, Beijing,100083, China
[2] Center of Materials Science and Optoelectronics Engineering & School of Microelectronics, University of Chinese Academy of Sciences, Beijing,100049, China
[3] Shenzhen DAPU Microelectronics Co., Ltd, Shenzhen,518100, China
[4] Beijing Key Laboratory of Semiconductor Neural Network Intelligent Sensing and Computing Technology, Beijing,100083, China