Control System for the Synthesis of Thin Films by Pulsed Laser Deposition

被引：0

作者：

Conde Garrido J.M. ^{[1
]}

Kuo C. ^{[1
]}

Silveyra J.M. ^{[1
]}

机构：

[1] Universidad de Buenos Aires, Facultad de Ingeniería, Lab. de Solidos Amorfos/Laboratorio de Ablacion Laser and CONICET - Universidad de Buenos Aires, Instituto de Tecnologías y Ciencias de la Ingeniería Hilario Fernández Long, Av. Paseo Colón 850, Buenos A

来源：

IEEE Latin America Transactions | 2019年 / 18卷 / 02期

关键词：

ablation; Arduino; embedded systems; PLD; pulsed laser deposition; thin films;

D O I：

10.1109/TLA.2019.9082259

中图分类号：

学科分类号：

摘要：

The pulsed laser ablation process is a widely used technique for thin films deposition. In this method, a pulsed laser beam focuses onto a target ablating the impact site, called spot. Since preparing the target is a highly time consuming and expensive task, the spot is generally scanned across the target's surface. A typical pulsed laser deposition configuration has a moving mirror that scans the laser beam across a rotating target. We propose ablating the target with a spiral pattern to ensure a uniform ablation and maximizing the target's efficiency. This requires moving the mirror and target in sync with variable speeds. To this end, we designed and built robust electromechanical actuators driven by stepper motors, which are electronically controlled by an Arduino-based system. The core of the firmware is a precalculated lookup table with the time intervals between the motors' steps. Thus, motor control following computationally expensive positioning functions -as the spiral pattern- are not a problem. Users may operate the control system through a user-friendly interface. The modular firmware architecture facilitates future extensions as, for example, adding other motor positioning functions to enable different ablation patterns for research purposes. This development aims to be a valuable tool for the synthesis of thin films by pulsed laser deposition. © 2003-2012 IEEE.

引用

页码：438 / 445

页数：7

共 34 条

[1]

Kn&die

[2]

rig A., Wettach R., Cohen J., Fritzing-A tool for advancing electronic prototyping for designers, Proceedings of the 3rd International Conference on Tangible and Embedded Interaction, pp. 351-358, (2009)

[3]

Conde Garrido J., Silveyra J.M., Urena M.A., Multi-ion and pH sensitivity of AgGeSe ion selective electrodes, Journal of Physics and Chemistry of Solids, 89, pp. 115-119, (2016)

[4]

Villafuerte M., Juarez G., Duhalde S., Golmar F., Degreef C., Heluani S., Resistance switching induced by electric fields in manganite thin films, Journal of Physics: Conference Series, (2007)

[5]

Ashfold M.N., Claeyssens F., Fuge G.M., Henley S.J., Pulsed laser ablation and deposition of thin films, Chemical Society Reviews, 33, pp. 23-31, (2004)

[6]

Schou J., Physical aspects of the pulsed laser deposition technique: The stoichiometric transfer of material from target to film, Applied Surface Science, 255, pp. 5191-5198, (2009)

[7]

Morintale E., Constantinescu C., Dinescu M., Thin films development by pulsed laser-assisted deposition, Physics AUC, 20, pp. 43-56, (2010)

[8]

Kuzanyan A.S., Kuzanyan A., Petrosyan V., Pilosyan S.K., Grasiuk A.Z., A simple solution to the problem of effective utilisation of the target material for pulsed laser deposition of thin films, Quantum Electronics, 43, (2013)

[9]

Arnold N., Bauerle D., Uniform target ablation in pulsed-laser deposition, Applied Physics A: Materials Science & Processing, 68, (1999)

[10]

Bonelli M., Cestari C., Miotello A., Pulsed laser deposition apparatus for applied research, Measurement Science and Technology, 10, (1999)

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