Rapid manufacturing of large diameter Cu micropillars by micro-electrical discharge machining and focused ion beam

被引：0

作者：

Lee, Ui Seok ^{[1
]}

Kim, Bo Hyun ^{[2
]}

Kim, Sang-Min ^{[3
]}

Oh, Chung-Seog ^{[4
]}

机构：

[1] Department of Mechanical Engineering, Graduate School, Soongsil University, Seoul,06978, Korea, Republic of

[2] School of Mechanical Engineering, Soongsil University, Seoul,06978, Korea, Republic of

[3] Department of Nano-mechanics, Korea Institute of Machinery and Materials, Daejeon,34103, Korea, Republic of

[4] Department of Mechanical System Engineering, Kumoh National Institute of Technology, Gumi,Gyeongbuk,39177, Korea, Republic of

来源：

International Journal of Advanced Manufacturing Technology | 2021年 / 113卷 / 3-4期

关键词：

Electric discharges - Electrochemical electrodes - Focused ion beams - Milling (machining) - Electric discharge machining - Ions - Energy dispersive spectroscopy - Copper - Single crystals - Capacitance - Fabrication;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

A hybrid manufacturing method consisting of micro-electrical discharge machining and focused ion beam milling to fabricate single-crystal Cu micropillars with a diameter of several tens of microns or more was proposed. The method first utilized micro-electrical discharge machining, which adopted a micro-tool made of WC-Co material, to fabricate the coarse micropillars, one by one. It took approximately 70 s to fabricate each coarse micropillar. Seventy-six coarse micropillars were fabricated in the process of exploring optimum input parameters of supply voltage and capacitance value. Energy dispersive spectroscopy and electron backscatter diffraction analyses revealed that pristine Cu material could be obtained by removing only 1.2 μm of surface layer. The micropillar was finished using a focused ion beam to form a 15 μm diameter smooth micropillar with an aspect ratio of 3. The desired micropillar was produced by removing a surface layer of 6 μm or more from the side surface to avoid the micro-electrical discharge machining effect. It took approximately 2.5 h to complete the fabrication of a micropillar by stepwise annular milling. In the case of the hybrid method, it was possible to fabricate a high-quality micropillar 17 times faster than the focused ion beam only method. © 2021, The Author(s), under exclusive licence to Springer-Verlag London Ltd. part of Springer Nature.

引用

页码：1153 / 1162