Research progress of surface acoustic wave ultraviolet detectors

被引：0
作者：
Yin C.-S. [1 ]
Zhou J. [1 ]
Liu Y. [2 ]
Wu J.-H. [1 ]
Xiong S. [1 ]
Duan H.-G. [1 ]
机构：
[1] State Key Laboratory of Automotive Body Design and Manufacturing, School of Mechanical and Transportation Engineering, Hunan University, Changsha
[2] National Innovation Center of Advanced Rail Transit Equipment, Zhuzhou
来源：
Zhou, Jian (jianzhou@hnu.edu.cn) | 1600年 / Chinese Academy of Sciences卷 / 28期
关键词：
GaN; Surface acoustic wave; Ultraviolet detection; ZnO;
D O I：
10.37188/OPE.20202807.1433
中图分类号：
学科分类号：
摘要：
Ultraviolet (UV) detectors based on the Surface Acoustic Wave (SAW) technology have become an active field of research owing to their advantages such as fast response, high sensitivity, simple fabrication, and wireless passive monitoring. In this study, the progress in the research of SAW UV detection, based on the classification of UV-sensitive films, was reviewed. The sensitive mechanism of SAW UV detection was analyzed and the characteristics, preparations, and UV performances of gallium nitride, doped gallium nitride, zinc oxide, doped zinc oxide, nanostructured zinc oxide, aluminum nitride, and other sensitive membrane materials were presented. This work also demonstrated the latest advancements in SAW UV sensors and their prospects in future development trends and challenges. © 2020, Science Press. All right reserved.
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页码：1433 / 1445
页数：12
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