Study on the process of micro-arc oxidation TiO2 film for rapid detection of triethylamine

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作者：
Pan, Mingqiang [1 ,2 ,3 ]
Shi, Zeming [1 ,2 ,3 ]
Liu, Jizhu [1 ,2 ,3 ]
Wang, Yangjun [1 ,2 ,3 ]
机构：
[1] School of Mechanical and Electric Engineering, Soochow University, Suzhou,215123, China
[2] Jiangsu Provincial Key Labor Atory of Advanced Robotics, Soochow University, Suzhou,215123, China
[3] Robotics and Microsystems Center, Soochow University, Suzhou,215123, China
来源：
Materials Science in Semiconductor Processing | 2022年 / 146卷
关键词：
Mathematical morphology - Morphology - Film preparation - Metal recovery - Oxidation - Pore structure - Chemical sensors - Gases - Metals - Electrolytes - Gas detectors;
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