Zero-mode waveguide device with microlens for enhancing fluorescence signal intensity

被引：0
作者：
Fu B.-W. [1 ,2 ]
Guo Z. [2 ,3 ,4 ]
Yu P.-F. [2 ,5 ]
Li C.-Y. [2 ,6 ]
Zhang Z.-Q. [2 ,5 ]
Zhou L.-Q. [1 ,2 ]
机构：
[1] Academy of Engineering & Technology, Fudan University, Shanghai
[2] Key Laboratory of Biomedical Detection Technology, Suzhou
[3] Suzhou Institute of Biomedical Engineering and Technology, Chinese Academy of Sciences, Suzhou
[4] Ji Hua Laboratory, Foshan
[5] University of Science and Technology of China, Hefei
[6] Suzhou CASENS Co., Ltd, Suzhou
来源：
Guangxue Jingmi Gongcheng/Optics and Precision Engineering | 2021年 / 29卷 / 08期
关键词：
Fluorescence signal detection; Microlens; Nanopore; Zero mode waveguides;
D O I：
10.37188/OPE.20212908.1921
中图分类号：
学科分类号：
摘要：
In this study, an improved zero-mode waveguide device is designed and developed. This device is used to enhance fluorescence signal intensity and eliminate fluorescence crosstalk. The device is fabricated using micro/nanofabrication technologies. It reduces the divergence angle of fluorescence through a combination of a microlens and nanopores; the constructive interference of fluorescence enhances the intensity of the detection signal. Specifically, electron beam lithography is used to prepare a nanohole array with a controllable diameter, and a microlens array with an adjustable angle is fabricated by combining ultraviolet lithography and reactive ion etching. ImageJ is used to read the fluorescence gray value for signal comparison. Compared with a standard zero-film waveguide device, the improved device increases the fluorescence signal intensity by 14.5 times and the signal-to-noise ratio by 9 times. As determined through SEM characterization, the nanopore diameter of the device is (100.3 ± 4.9) nm, and the inclination angle of the microlens is (21.1 ± 0.7)°. The improved zero-mode waveguide device can effectively mitigate fluorescence crosstalk while enhancing fluorescence signal intensity. Related research provides a feasible solution to the problems of weak fluorescence detection and fluorescence crosstalk. © 2021, Science Press. All right reserved.
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页码：1921 / 1930
页数：9
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