Design of a symmetrical eight-mass MEMS gyroscope

被引：0
作者：
Jiang B. [1 ]
Li Y. [1 ]
Su Y. [1 ]
机构：
[1] Nanjing University of Science and Technology, School of Mechanical Engineering, Nanjing
来源：
Su, Yan (suyan@njust.edu.cn) | 1600年 / Editorial Department of Journal of Chinese Inertial Technology卷 / 29期
关键词：
MEMS gyroscope; Modal matching; Symmetrical;
D O I：
10.13695/j.cnki.12-1222/o3.2021.04.010
中图分类号：
学科分类号：
摘要：
The fully symmetrical structure working in the case of mode matching has become an important technical implementation scheme of high-performance MEMS gyroscope. In the fully symmetrical structure, ring gyroscope has the advantages of good symmetry and can work in full angle mode, but its disadvantages are small capacitance and light effective mass. Aiming at this situation, a fully symmetrical eight mass MEMS gyroscope with embedded comb capacitor is presented. The gyroscope also has 2θ or 3θ mode, and the precession of motion state can be realized through the coupling of motion between mass blocks and Coriolis force. The layout size of the resonator is 5.5 mm × 5.5 mm, resonance frequency 20 kHz. The structure has an effective mass of 4.83 mg, which is three times that of the multi-ring structure. The structure has the advantages of large sensitive mass and large capacitance, and is expected to be the next generation of high-performance, light, small and fast response gyroscope. © 2021, Editorial Department of Journal of Chinese Inertial Technology. All right reserved.
引用
收藏
页码：491 / 495
页数：4
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