A method to optimize the output power of mems vibrational energy harvester

被引：0

作者：

Mitsuya H. ^{[1
]}

Ashizawa H. ^{[1
]}

Shimomura N. ^{[1
]}

Honma H. ^{[2
]}

Hashiguchi G. ^{[3
]}

Toshiyoshi H. ^{[2
]}

机构：

[1] RandD Center, Saginomiya Seisakusho Inc., 535 Sasai Saitama, Sayama

[2] Institute of Industrial Science, The University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo

[3] Department of Mechanical Engineering, Shizuoka University, 3-5-1 Johoku, Naka-ku Shizuoka, Hamamatsu

来源：

IEEJ Transactions on Sensors and Micromachines | 2021年 / 141卷 / 07期

关键词：

Electret; Energy harvester; MEMS; Output power optimization; Potassium ion;

D O I：

10.1541/ieejsmas.141.245

中图分类号：

学科分类号：

摘要：

A MEMS vibrational energy harvester is developed as a power source for infrastructures monitoring systems. The output power is maximized by appropriately choosing the load resistance in accordance with the vibration conditions of the vibration source. Output power of more than 500 μW is obtained from the vibrations caused by a vacuum pump used in a factory. © 2021 The Institute of Electrical Engineers of Japan.

引用

页码：245 / 253

页数：8

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