Current transport in Ni Schottky barrier on GaN epilayer grown on free standing substrates

被引:2
|
作者
Greco G. [1 ]
Fiorenza P. [1 ]
Schilirò E. [1 ]
Bongiorno C. [1 ]
Di Franco S. [1 ]
Coulon P.-M. [2 ]
Frayssinet E. [2 ]
Bartoli F. [2 ]
Giannazzo F. [1 ]
Alquier D. [3 ]
Cordier Y. [2 ]
Roccaforte F. [1 ]
机构
[1] Consiglio Nazionale delle Ricerche, Istituto per la Microelettronica e Microsistemi (CNR-IMM), Catania
[2] Université Côte d'Azur, CNRS, CRHEA, Valbonne
[3] Université Tours and GREMAN, Tours
基金
欧盟地平线“2020”;
关键词
Barrier height; Bulk GaN; GaN device; Reverse current; Schottky diodes;
D O I
10.1016/j.mee.2023.112009
中图分类号
学科分类号
摘要
In this paper, the Ni Schottky barrier on GaN epilayer grown on free standing substrates has been characterized. First, transmission electrical microscopy (TEM) images and nanoscale electrical analysis by conductive atomic force microscopy (C-AFM) of the bare material allowed visualizing structural defects in the crystal, as well as local inhomogeneities of the current conduction. The forward current-voltage (I-V) characteristics of Ni/GaN vertical Schottky diodes fabricated on the epilayer gave average values of the Schottky barrier height of 0.79 eV and ideality factor of 1.14. A statistical analysis over a set of diodes, combined with temperature dependence measurements, confirmed the formation of an inhomogeneous Schottky barrier in this material. From a plot of ΦB versus n, an ideal homogeneous barrier close to 0.9 eV was estimated, similar to that extrapolated by capacitance-voltage (C–V) analysis. Local I-V curves, acquired by means of C-AFM, displayed the inhomogeneous distribution of the onset of current conduction, which in turn resembles the one observed in the macroscopic Schottky diodes. Finally, the reverse characteristic of the diodes fabricated in the defects-free region have been acquired at different temperature and its behaviour has been described by the thermionic field emission (TFE) model. © 2023
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